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Microfigure Measuring Instrument SURFCORDER

 

Modeeel: ET4000

Industry: Automatic/Industrial Machines & Equipments / Testing Equipment / Inspecting/Measuring Instrument and Parts

 

Supplier; Sanpany Instruments Co., Ltd.

Booth No: N/A

 

 

Characteristics

 

Excellent in accuracy, stability and functionality, ET4000 is a fully automatic, most appropriate for measurement of micro figure, step height and roughness of FPD, wafers, hard disks, and other nano-order application. ET4000 series can be selected from a number of models according to applications.

ET4000A: Multifunctional and automatic
ET4000L: Fully automatic, compatible with large precision glass or wafer size sample
ET4000M: Reasonable, high performance and general-use

 

Specifications

 

Max. sample size 210 × 210 mm to 300 × 400 mm Repeatability 1 σ within 0.5 nm Measuring range Z: 100 μm  X: 100 mm   (Y stroke: 150 to 400 mm) Resolution Z: 0.1 nm  X: 0.01 μm Measuring force 0.5 μN to 500 μN

 

 

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