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Single wafer Etching/Cleaner SWC30XX
Model: Single wafer Etching/Cleaner SWC30XX
Category: Automatic/Industrial Machines & Equipments / Automated Machinery & Equipments / Pneumatic Automatic Machines
Characteristics
Model Comparisons
Feature SWC3008 SWC3012 SWC3016
No. of Chambers 8 12 16
Max Throughput 480 wf/hr User Spec. User Spec.
Width 2,230 mm 2,300 mm 2,300 mm
Length 2,165 mm 2,760 mm 2,760 mm
Height 3,150 mm 2,450 mm 3,150 mm
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