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Tel: 886-4-23592289
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SWIM
Model: SWIM1510
Category: Automatic/Industrial Machines & Equipments / Testing Equipment / Inspecting/Measuring Instrument and Parts
Characteristics
Features:
0.1nm resolution in height/depth
Micro-3D Depth Inspection
High-speed/ Non-contact area alanysis
Non-electron beam/Non-laser
Transparent material is also suitable
Surface profile/ roughness analysis
Applications:
Nano-depth 3D profile fast presents. Carmar's SWIM-1510MS designs with the latest scanning white-light interferometric technology. Outstanding performance with simple operation, customer design flexibility and high-precision scanning, the Micro-3D profile and surface texture can be done by non-contact and non- constructive operation in normal environment. Moreover, nano-level surface roughness and step height calculation are traced to ISO International standardization.
Powerful SWIM series white-light Interferometer can acquire the scanning data of FOV in a few seconds. 3D profile and height inspection results obtaining is better than point to point con-focal microscope. The 3D graphic measuring ability is better than scanning electron microscope.
No matter the polishing, rough layer, or even the transparent material can be inspected by SWIM as long as the reflection rate of measured object is over 1%. SWIM is suitable for the inspections of surface profiles and micro-structure for all kinds of materials and components. The applications are as below:
Glass lens
Coating surface
Semiconductor Wafers
Data Storage Surface (HDD, DVD, CD)
MEMS Components
LCD
high-density interconnect PCB
IC Package
Micro Mechanical Parts and analysis and surface research of other materials and Precision Machined Surface.
Vertical Phase Shift Interferometry scanning technology, depth resolution can reach 0.1nm
SWIM series provides Vertical Resolution: 0.1 nm, Lateral Space Resolution: 0.61nm(50X lens) with max vertical scanning speed can go up to 12μm/s. The ability of high speed presentation of 3D Micro-Profile is necessary tool for research, RD, and quality check for production.
Specifications
Optical system
Scanning White-light Microscope System
Height measurement
Scanning Range
100 mm ( 400 mm, Optional)
Resolution
0.1 nm
Repeatability (σ)
≦ 0.1 % ( Range: > 10 um
≦ 10 nm ( Range: 1 um ~ 10 um)
≦ 5 nm ( Range: <1 um )
Control mode Auto
Scanning speed (um/s) 12 (Max.)
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