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Contact Information
No. 207, Sec. 2, Zhonghua Rd., Wuqi Dist., Taichung city
Tel: 886-4-26655180
Fax: 886-4-26629260
Dual Door Evaporation/ Sputtering Vacuum Coater
Model: BPSD-1500
Category: Plastic and Rubber Industry / Machinery for Processing Plastics / Plastic Finishing Machines
Characteristics
Features:
Dual chamber for independent loading operations.
Four kinds of coating process modes available foe selection.
Option: RF generators or magnetron sputtering source can be installed for surface coating.
LP-BSD series uses planetary rotation mechanism to achieve good film uniformity on curved surface substrates.
Application:
Decorative items
Cellphone housing
NCVM applications
Metallic finish
Specifications
|
System/Model
|
LP- 1500 BSPD
|
|
|
Chamber Size
|
Diameter
|
1,500 mm
|
|
Height
|
1,500 mm
|
|
|
Capacity
|
-
|
∮135x1,250 x24
|
|
Main Performance
|
Ultimate Pressure
|
Better than 10-6 Torr
|
|
Operation Pressure
|
From 1 atm to 5x10-5 Torr within 10 minutes (unloading)
|
|
|
View Windows
|
Set
|
1
|
|
Number of Filaments
|
Pcs
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20~24
|
|
Pumping System
|
Rotary Pump
|
6,000~10,000 L/min
|
|
Booster Pump
|
2,000~5,000 M3/ hour
|
|
|
Diffusion Pump
|
45000 L/ sec
|
|
|
Holding Pump
|
300~600 L/min (Optional)
|
|
|
Meissner Trap
|
-110 ~ -140 ℃
|
|
|
Vacuum Gauge
|
|
Pirani (760 ~10-3 Torr); Cold Cathode (10-3 ~ 10-6 Torr)
|
|
Control Box
|
Set
|
1
|
|
Evaporation Power Supply
|
|
35KW
|
|
Sputtering Target
|
Pcs
|
2~4
|
|
Evaporation Power Supply
|
|
RF or DC
|
|
System Operation
|
|
Automatic/ Manual
|
|
Cooling water flow rate
|
|
100 L/min
|
|
High Vacuum Valve
|
|
36 inch
|
|
Roughing Valve
|
|
6 inch
|
|
Foreline Valve
|
|
6 inch
|
|
Leak Valve
|
|
2 inch
|
|
Holding Valve (option)
|
|
1 inch
|
|
Cooling Tower
|
|
15 RT (Water Pressure: 4kg/ cm2; Pressure Drop: 2kg/ cm2)
|
|
Cooling Water
|
|
Inlet: 18℃; Outlet: 25℃; Standard: 20±1℃
|
|
Polycold
|
|
Option
|
|
Air Compressor
|
|
3HP (Air Pressure: 6 ~ 8 kg/ cm2)
|
|
Electrical Control System
|
|
PLC
|
|
Total Power Requirement
|
|
85KW
|
|
Environment Requirement
|
Clean Room(ISO Class 5); Exopy Flooring; Air-conditioning; Temp.25±3℃; HUM50±10%
|
|
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