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No.64, Changchun Rd., Xindian Dist., New Taipei City 231, Taiwan (R.O.C.)
Tel: 886-2-22173688
Fax: 886-2-22176411
Perfluorinated liquids
Model: FL-98
Category: Machinery Parts and Components / Other Machinery / Other Machinery
Characteristics
Fluorez FL-98 is a clear, colorless, and thermally stable perfluorinated liquid which is ideally to use as heat transfer fluids in variety of instruments.
Properties of FL-98 permit its use as a direct contact single and two-phase coolant in certain semiconductor manufacturing industry and other sensitive electronics.
Working temperature of FL-98 is between -60°C to 98°C which makes it perfectly to apply in Reactive Ion Etching System, ion implanter or other test equipment.
Fluorez FL-98 has zero ozone depletion potential. The material is neither defined by the U.S. EPA, nor as a volatile organic compound (VOC). FL-98 also contributes to zero ground-level smog formation and is environmental friendly.
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