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Tel: 886-3-5181250
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200mm SMIF Pod Openers: POM-200/ PLM-200/ PLM-200UL/ PIS-200
Model: POM-200/ PLM-200/ PLM-200UL/ PIS-200
Category: Automatic/Industrial Machines & Equipments / Automated Machinery & Equipments / Peripheral Equipment for Automated Machinery
Characteristics
PLM-200
●PLM-200 (Class-1)
●200mm SMIF Pod Opener for EFEM Applications
●363mm (W) x 421mm (D) x 700mm (H)
●247mm pod table height
●CE, S2
PLM-200UL
●PLM-200UL (Class-1)
●200mm SMIF Pod Opener for EFEM Applications
●382mm(W)x415mm(D)x665mm(H)
●62mm pod table height
●CE,S2
POM-200
●POM-200 (Class-1)
●Standalone Applications
●200mm SMIF Pod Opener
●336mm (W) x 466mm (D) x 700mm (H)
●CE,S2
PLS-200
●Standalone Applications
●200mm SMIF Pod Opener
●340mm x 390mm x 110mm
Specifications
PLM-200
●PLM-200 (Class-1)
●200mm SMIF Pod Opener for EFEM Applications
●363mm (W) x 421mm (D) x 700mm (H)
●247mm pod table height
●CE, S2
PLM-200UL
●PLM-200UL (Class-1)
●200mm SMIF Pod Opener for EFEM Applications
●382mm(W)x415mm(D)x665mm(H)
●62mm pod table height
●CE,S2
POM-200
●POM-200 (Class-1)
●Standalone Applications
●200mm SMIF Pod Opener
●336mm (W) x 466mm (D) x 700mm (H)
●CE,S2
PLS-200
●Standalone Applications
●200mm SMIF Pod Opener
●340mm x 390mm x 110mm
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