Our Products
Contact Information
No. 3, Ln. 61, Sec. 6, Zhonghua Rd., Yanshui Vil., Xiangshan Dist., Hsinchu City 300104, Taiwan
Tel: 886-3-5181250
Fax: 886-3-5181350
SIO-300 series: Integrated 300mm Process Tools, Oven, FTIR Wafer Inspection Tool
Model: SIO-300 series: Integrated 300mm Process Tools, Ov
Category: Automatic/Industrial Machines & Equipments / Automated Machinery & Equipments / Peripheral Equipment for Automated Machinery
Characteristics
FTIR-300 Defect Review Tool
Fortrend EFEM solution
Automatic 300mm wafer inspecting tool
SIO 300 Oven Tool
The Oven system has integrated mini-enviroment, 300mm load ports, wafer robot, cassette robot, YES series oven and control unit
200mm cassette manual/auto load available
Wide operating range: ambient~450 degree
Full automatic
Friendly operational interface.
Class 10.
N2 bake oven
SECSI/SECSII
Wafer and Robotic arm protrusion detection
Main controller: IPC
OS: Win XP professional
Modular design minimizes adjustments, maintenance and downtime.
Shipping Cassette Handler
Specifications
FTIR-300 Defect Review Tool
Fortrend EFEM solution
Automatic 300mm wafer inspecting tool
SIO 300 Oven Tool
The Oven system has integrated mini-enviroment, 300mm load ports, wafer robot, cassette robot, YES series oven and control unit
200mm cassette manual/auto load available
Wide operating range: ambient~450 degree
Full automatic
Friendly operational interface.
Class 10.
N2 bake oven
SECSI/SECSII
Wafer and Robotic arm protrusion detection
Main controller: IPC
OS: Win XP professional
Modular design minimizes adjustments, maintenance and downtime.
Shipping Cassette Handler
Featured products
