Our Products
Contact Information
Rm. 213, No. 31, Gongye 2nd Rd., Annan Dist., Tainan City 709 , Taiwan
Tel: 886-6-3560355
Fax: 886-2-23955335-3560467#
DC Power Supplies For Magnetoron Supplies
Model: ATNDC05~ATNDC300
Category: Automatic/Industrial Machines & Equipments / Automated Machinery & Equipments / Automatic Control Systems
Characteristics
ATN POWER provides advanced plasma application of DC power; can be divided into standard products, or according to your specific application. The power supply can be single or multiple output DC power supply that is capable of very rapid inhibition arc energy storage and low arc. Available in standard power range: 0.5 to 30KW, the power supply products come with forced air cooling or water cooling.
FEATURES
◎Short Circuit, Over-Load and Arc Protected.
◎Low Arc Energy Storage.
◎High Uptime and Product Life Cycle.
◎Can be Set to On / Off Time.
◎Suitable for Sputtering, Reactive Sputtering Apparatus.
APPLICATIONS
◎suitable for sputtering, reactive sputtering apparatus and PVD, bias sputtering equipment.
◎suitable for etching equipment and plating equipment.
◎surfactant、electromagnet、plasma cleaning.
Specifications
|
MODEL |
ATNDC10 |
ATNDC50 |
|
INPUT VOLTAGE |
1ψ, 220Vac±10％ , 50/60Hz |
|
|
OUTPUT POWER |
1KVA |
5KVA |
|
OUTPUT VOLTAGE |
1000V (max1200V) |
|
|
OUTPUT CURRENT |
1.5A |
6.5A |
|
SERIAL PORT CONNECTOR |
RS-485, 9-pin, 25-pin, sub-miniature D, female |
|
|
CONTROL MODE |
CURRENT / VOLTAGE / POWER |
|
|
DISPLAY TYPE |
LCD MODLE |
|
|
COOLING |
FORCED AIR |
|
|
MODEL |
ATNDC100 |
ATNDC150 |
ATNDC200 |
ATNDC300 |
|
INPUT VOLTAGE |
3ψ, 380Vac±10％ , 50/60Hz |
|||
|
OUTPUT POWER |
10KVA |
15KVA |
20KVA |
30KVA |
|
OUTPUT VOLTAGE |
800V (max1500V) |
|||
|
OUTPUT CURRENT |
12.5A |
18.75A |
25A |
37.5A |
|
CONTROL MODE |
CURRENT / VOLTAGE / POWER |
|||
|
SERIAL PORT CONNECTOR |
RS-485, 9-pin, 25-pin, sub-miniature D, female |
|||
|
DISPLAY TYPE |
LCD MODLE |
|||
|
COOLING |
WATER-COOLED |
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