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Contact Information
Rm. 213, No. 31, Gongye 2nd Rd., Annan Dist., Tainan City 709 , Taiwan
Tel: 886-6-3560355
Fax: 886-2-23955335-3560467#
MSB BI-POLAR PULSE MAGNETRON SPUTTERING Mid-Frequency Power Supplies
Model: MFPS-01~MFPS-45
Category: Automatic/Industrial Machines & Equipments / Automated Machinery & Equipments / Automatic Control Systems
Characteristics
FEATURES
◎ High Efficiency、Low Noise.
◎ With Automatic Steady Flow Function.
◎ Ensure the stability of the target surface clean, but also improves the speed of the target surface cleaning.
◎ Has a voltage drooping characteristics, fully meet the special requirements of magnetron sputtering.
◎ A bipolar pulse magnetron sputtering power supply for the intermediate frequency twins magnetron sputtering of metal and non-metallic materials, especially for reactive magnetron sputtering system ITO film,dielectric film, and insulating protection film
APPLICATIONS
◎ Vacuum coating equipment.
◎ Induction heating equipment.
◎ Cleaning equipment.
Specifications
|
MODEL |
MFPS-01 |
MFPS-05 |
MFPS-15 |
MFPS-30 |
MFPS-45 |
|
INPUT VOLTAGE |
1ψ, 220Vac±10％ , 50/60Hz |
3ψ, 380Vac±10％ , 50/60Hz |
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|
OUTPUT POWER |
1KVA |
5KVA |
15KVA |
30KVA |
45KVA |
|
OUTPUT VOLTAGE |
800V (max1200V) |
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|
OUTPUT CURRENT |
2A |
6.25A |
18.75A |
37.5A |
60A |
|
CONTROL MODE |
CURRENT |
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SERIAL PORT CONNECTOR |
RS-485, 9-pin, 25-pin, sub-miniature D, female |
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DISPLAY TYPE |
LCD MODLE |
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COOLING |
AIR- COOLED |
WATER-COOLED |
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