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Contact Information
No. 8, Kaian 6th St., Annan Dist., Tainan City 709, Taiwan
Tel: 886-6-3560355
Fax: 886-6-3560467
MSB BI-POLAR PULSE MAGNETRON SPUTTERING Mid-Frequency Power Supplies
Model: MFPS-01~MFPS-45
Category: Automatic/Industrial Machines & Equipments / Automated Machinery & Equipments / Automatic Control Systems
Characteristics
FEATURES
High EfficiencyBLow Noise.
With Automatic Steady Flow Function.
Ensure the stability of the target surface clean, but also improves the speed of the target surface cleaning.
Has a voltage drooping characteristics, fully meet the special requirements of magnetron sputtering.
A bipolar pulse magnetron sputtering power supply for the intermediate frequency twins magnetron sputtering of metal and non-metallic materials, especially for reactive magnetron sputtering system ITO film,dielectric film, and insulating protection film
APPLICATIONS
Vacuum coating equipment.
Induction heating equipment.
Cleaning equipment.
Specifications
MODEL |
MFPS-01 |
MFPS-05 |
MFPS-15 |
MFPS-30 |
MFPS-45 |
INPUT VOLTAGE |
1ψ, 220Vac±10H , 50/60Hz |
3ψ, 380Vac±10H , 50/60Hz |
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OUTPUT POWER |
1KVA |
5KVA |
15KVA |
30KVA |
45KVA |
OUTPUT VOLTAGE |
800V (max1200V) |
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OUTPUT CURRENT |
2A |
6.25A |
18.75A |
37.5A |
60A |
CONTROL MODE |
CURRENT |
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SERIAL PORT CONNECTOR |
RS-485, 9-pin, 25-pin, sub-miniature D, female |
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DISPLAY TYPE |
LCD MODLE |
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COOLING |
AIR- COOLED |
WATER-COOLED |
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